An electrode-free method of characterizing the microwave dielectric properties of high- permittivity thin films
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Microwave dielectric properties of tunable capacitors employing bismuth zinc niobate thin films
Parallel plate capacitors employing Bi1.5Zn1.0Nb1.5O7 sBZNd thin films with the pyrochlore structure were fabricated on platinized sapphire substrates. The total device quality factor and capacitance were analyzed in the microwave frequency range sup to 20 GHzd by measuring reflection coefficients with a vector network analyzer. The parasitics due to the probe pads were extracted from the measu...
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